JPS5979104A - 光学装置 - Google Patents

光学装置

Info

Publication number
JPS5979104A
JPS5979104A JP57189761A JP18976182A JPS5979104A JP S5979104 A JPS5979104 A JP S5979104A JP 57189761 A JP57189761 A JP 57189761A JP 18976182 A JP18976182 A JP 18976182A JP S5979104 A JPS5979104 A JP S5979104A
Authority
JP
Japan
Prior art keywords
light
objective lens
photodetector
optical
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57189761A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256604B2 (en]
Inventor
Keiichi Yoshizumi
恵一 吉住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57189761A priority Critical patent/JPS5979104A/ja
Publication of JPS5979104A publication Critical patent/JPS5979104A/ja
Publication of JPH0256604B2 publication Critical patent/JPH0256604B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP57189761A 1982-10-27 1982-10-27 光学装置 Granted JPS5979104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57189761A JPS5979104A (ja) 1982-10-27 1982-10-27 光学装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57189761A JPS5979104A (ja) 1982-10-27 1982-10-27 光学装置

Publications (2)

Publication Number Publication Date
JPS5979104A true JPS5979104A (ja) 1984-05-08
JPH0256604B2 JPH0256604B2 (en]) 1990-11-30

Family

ID=16246731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57189761A Granted JPS5979104A (ja) 1982-10-27 1982-10-27 光学装置

Country Status (1)

Country Link
JP (1) JPS5979104A (en])

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169706A (ja) * 1984-02-14 1985-09-03 Olympus Optical Co Ltd 表面形状測定装置
JPS6184508U (en]) * 1984-11-06 1986-06-04
JPS629211A (ja) * 1985-07-05 1987-01-17 Matsushita Electric Ind Co Ltd 光学測定装置
JPS62172208A (ja) * 1986-01-27 1987-07-29 Osaka Seimitsu Kikai Kk 光学的形状測定方法
JPS62238403A (ja) * 1986-04-09 1987-10-19 Mitsubishi Electric Corp 表面形状測定装置
JPS63275323A (ja) * 1987-05-08 1988-11-14 Hamamatsu Photonics Kk 診断装置
JPH05172738A (ja) * 1991-12-24 1993-07-09 Jasco Corp 音響セル
US5283630A (en) * 1991-02-04 1994-02-01 Matsushita Electric Industrial Co., Ltd. Error correcting method for measuring object surface using three-dimension measuring apparatus
US5488230A (en) * 1992-07-15 1996-01-30 Nikon Corporation Double-beam light source apparatus, position detecting apparatus and aligning apparatus
WO2016050453A1 (en) * 2014-10-03 2016-04-07 Asml Netherlands B.V. Focus monitoring arrangement and inspection apparatus including such an arragnement

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169706A (ja) * 1984-02-14 1985-09-03 Olympus Optical Co Ltd 表面形状測定装置
JPS6184508U (en]) * 1984-11-06 1986-06-04
JPS629211A (ja) * 1985-07-05 1987-01-17 Matsushita Electric Ind Co Ltd 光学測定装置
JPS62172208A (ja) * 1986-01-27 1987-07-29 Osaka Seimitsu Kikai Kk 光学的形状測定方法
JPS62238403A (ja) * 1986-04-09 1987-10-19 Mitsubishi Electric Corp 表面形状測定装置
JPS63275323A (ja) * 1987-05-08 1988-11-14 Hamamatsu Photonics Kk 診断装置
US5283630A (en) * 1991-02-04 1994-02-01 Matsushita Electric Industrial Co., Ltd. Error correcting method for measuring object surface using three-dimension measuring apparatus
JPH05172738A (ja) * 1991-12-24 1993-07-09 Jasco Corp 音響セル
US5488230A (en) * 1992-07-15 1996-01-30 Nikon Corporation Double-beam light source apparatus, position detecting apparatus and aligning apparatus
WO2016050453A1 (en) * 2014-10-03 2016-04-07 Asml Netherlands B.V. Focus monitoring arrangement and inspection apparatus including such an arragnement
TWI571709B (zh) * 2014-10-03 2017-02-21 Ａｓｍｌ荷蘭公司 聚焦監控之配置及包括此種配置之檢測裝置
US9921489B2 (en) 2014-10-03 2018-03-20 Asml Netherlands B.V. Focus monitoring arrangement and inspection apparatus including such an arrangement

Also Published As

Publication number Publication date
JPH0256604B2 (en]) 1990-11-30

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